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Lightoptical deformation measurements in microbars with nanometer resolution

E. Mazza, G. Danuser and J. Dual
Microsystem Technologies - Sensors - Actuators - System Integration, Springer
Vol. 2, No. 2, pp. 83-91, 1996

Abstract

In a microsample tensile test the deformation of the testing region is observed with a light microscope. Using a new vision algorithm, elongations are determined with nanometer resolution. The image analysis system operates with adaptive least squares correlation and contains a diagnostic tool which provides information about the computational precision and determinability of the parameters to be estimated. Various tests are performed to verify the reliability and sensitivity of the presented method and to show its potential in the field of micromechanics.


Download in postscript format
@Article{eth_biwi_00084,
  author = {E. Mazza and G. Danuser and J. Dual},
  title = {Lightoptical deformation measurements in microbars with nanometer resolution},
  journal = {Microsystem Technologies - Sensors - Actuators - System Integration, Springer},
  year = {1996},
  month = {},
  pages = {83-91},
  volume = {2},
  number = {2},
  keywords = {matching, optimization, quality control, microscopy}
}