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Accuracy Measurements on Interferometric (or other) Gratings

I. Pappas
156, 1995
Image Science Group, ETH Zürich


Accuracy tests and measurements can now be performed for interferometric gratings using Computer Vision supported by least square matching algorithms. We have developped a technique which determines the relative statistical error of the periodicity of any given gratings. Serial period-measurements can be taken between two or several lines in any direction. The measured data is statistically treated and can viewed graphically.

Interferometric gratings are used in some cases as calibration standards for Scanning Electron Microscopes. It is important to know the accuracy of these gratings, since the calibration itself can not be more accurate than the calibration standard.

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  author = {I. Pappas},
  title = {Accuracy Measurements on Interferometric (or other) Gratings},
  year = {1995},
  number = {156},
  institution = {Image Science Group, ETH Z\"urich},
  keywords = {matching, measurement, scanning electron microscopy, quality control}